IC & MEMS Packaging

 

IC & MEMS packaging is carried out in various MIL-STD-1835C ceramic and metal can packages viz. DIP, QFP, Gull-wing chip carrier, J-lead chip carrier, PGA, TO-8 etc. Custom packages, as per application requirements are developed for ASICs, electro-optical sensors and MEMS devices. All the packaging processes are qualified as per the requirements of MIL-PRF-38535 and the packaged devices tested to meet the MIL-STD-883 requirements.

The Assembly and Packaging facility is housed in Class 1K/10k, ESD-safe clean room area of about 5000 sq.ft.

 

PACKAGING PROCESS
 

Silicon wafers, glass-bonded silicon wafers and alumina substrates are diced using hub-type and hub-less blades. The process is carried out under a DI water jet. Wafers upto 150 mm diameter and 1.5 mm. thick are diced.

 

 


 

Die attachment is done on ceramic packages, metal headers, PCB and ceramic substrates. Silver-glass, conductive epoxy and non-conductive epoxy processes are used depending on the application requirement or type of package. Typical placement accuracy is ± 20 mm.






 

Al-wire wedge bonding is done on ceramic packages, metal headers, PCB and ceramic substrates. Gold-wire ball-bonding is also available for Chip-on boards. Typically 1.25 mil bonding wire is being used and devices with wire-counts upto 350 have been wire-bonded. The fully automatic equipment can handle 500 wires of 0.7-1.5mil dia.

 




 

Ceramic packages are hermetically sealed in fully programmable thermal and IR furnaces. Au-Sn eutectic and glass-frit sealing processes are used. KOVAR headers and caps are hermetically sealed using Laser-welding process.

 

 

 


ELECTRO-OPTICAL DEVICE PACKAGING
 

Special processes have been developed, qualified for packaging of electro-optical devices viz. 4K Linear Imager, Frame Transfer Imager and TDI etc.

New materials have been identified and a low temperature process developed to ensure low-stress die-attachment of large dies. Custom equipment and tools have been developed to get placement accuracy better than
± 10 mm.

A low temperature process is developed for hermetic sealing of AR coated sapphire windows to the ceramic packages

 

MEMS PACKAGING
 

MEMS devices are packaged using the same base-line processes as those for CMOS device packaging in ceramic, Kovar and stainless steel packages.                                            

 

 

Following variants of the standard processes and packages are developed to meet the MEMS specific applications such as:
 

Retrofitting of standard dicing tools with customised accessories for through-cut dicing of 675 mm thick silicon wafers that are bonded to 1mm thick Pyrex glass. Special techniques are also developed for wafer mounting and die release.
 

Special encapsulation techniques to protect the wire bonds while the MEMS structure is exposed to the stimulus (pressure, temperature, humidity etc.)
 

New materials and processes for low temperature (125°C) sealing.
 

Screen Printing of Thick Film Resistors on ceramic substrates.
 

Laser Trimming of thick film resistors printed on ceramic substrates.
 

CHIP ON BOARD PACKAGING
 

Chip on board (COB) technology delivers a cost effective solution for IC packaging as it provides direct attachment of bare die to PCB. PCB size could vary from 25 to 80 mm square.  Products viz. Analog Watch COBs, Hearing Aid, Digital Organiser etc. have been assembled in the past. Some MEMS devices are also packaged using the COB processes/packages.