Micro-Electro-Mechanical Systems (MEMS)

Micromachined RF-Capacitor

			Polyimide Filled Cavity
			Series Resonant freq. : 4.5GHz
			Capacitance             : 2 pF
			Quality factor           : 37

	Micromachined X-Band Resonator

			Features
			Two wafer concept
			Q ≈300
			IL = 10dB
			RL= 30dB
			Size: 15.5 mm x 15.38 mm
			Applications
			Band pass filters
			Planar Oscillators
	Frequency scaled Resonator
	On Low Resistivity Silicon				With Polyimide filed Cavity
							Q reduction from 300 to 200
							Frequency lowered by 2GHz.
							Remains to be compact at low  frequency too.
							CMOS compatible process amenable for SoC.
	Ultra wideband Filters (UBF)
		Band stop Filter						Band pass Filter
				Center Frequency : 6.8 GHz					Center Frequency : 6.8 GHz
				Bandwidth           : > 100%					Bandwidth           : > 100 %
				Return Loss         : > 25 dB in 5 GHz band					Return Loss         : > 10 dB in 5GHz band
				Insertion Loss      :<1.5 dB					Insertion Loss      :   <1 dB

	Multiband Filters
	Dual-band BSF	Tri-band BSF

 

		Frequency Bands : C & K			Frequency Bands : C, Ku & K
		Insertion Loss     : <1.5 dB			Insertion Loss     : <1.8 dB
		Return Loss        : >15 dB			Return Loss        : >15 dB

Updated on April 08, 2008